ZnO/SiO2/Si复合结构的声表面波器件特性分析
朱敏, 谢立强, 刘智荣, 包文歧, 徐才华
Characteristics Analysis of Surface Acoustic
Wave Devices with ZnO/SiO2/Si Composite Structure
ZHU Min, XIE Liqiang, LIU Zhirong, BAO Wenqi, XU Caihua
陆军工程大学学报
.
2022, (2): 39
-44
.
DOI: 10.12018/j.issn.2097-0730.20201209001
